[Paper] Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

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Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co, Han-Bo-Ram Lee, J. Y. Son and Hyungjun Kim, Applied Physics Letters, 2007


http://dx.doi.org/10.1063/1.2742791