Contributed talks at international conferences
Contributed talks at Korean conferences
Invited talks
2016
18. Han-Bo-Ram Lee, “Textile-Based Pressure Sensor Prepared by Atomic Layer Deposition,” Korean Society of Opticalelectronics Meeting 2016, Gwangju, Korea, January 26 - 27, 2016
17. Han-Bo-Ram Lee, “Electronic Textiles Fabricated using Atomic Layer Deposition,” CIMTEC 2016, Perugia, Italy, June 5 - 10, 2016
16. Han-Bo-Ram Lee, “Atomic Layer Deposition of Metals on Textiles for Wearable Electronics,” China ALD 2016, Suzhou, China, October 16 - 19, 2016
15. Han-Bo-Ram Lee, “Defect Healing of Graphene for Conductive Flexible Electrodes by Wet & Dry Methods,” International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2016, Jeju, Korea, November 6 - 9, 2016
14. Han-Bo-Ram Lee, “Opportunities in Atomic Layer Deposition for Electronic Textile and Hydrophobic Coating Applications,” 228th Electrochemical Society Meeting, Phoenix, AZ, USA, October 11 - 15, 2015
13. Han-Bo-Ram Lee, “Opportunities of Atomic Layer Deposition for Electronic Textile Applications,” The Korean Fiber Society Fall Meeting 2015, Busan, Korea, November 5 - 6, 2015
12. Han-Bo-Ram Lee, “Atomic Layer Deposition of Rare Earth Oxide for Hydrophobic Coating,” Korean Institute of Surface Engineering Fall Meeting 2015, Yongin, Korea, November 26 - 27, 2015
11. Han-Bo-Ram Lee, “Pt Nanoparticle on Site-Constrained Surface by Atomic Layer Deposition,” The 6th Asian Conference on Crystal Growth and Crystal Technology, Jeju, Korea, June 11 - 14, 2014
10. Han-Bo-Ram Lee, “ALD of Noble Metals for Energy Application,” 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15 - 18, 2014
9. Han-Bo-Ram Lee, “Atomic Layer Deposition of Metals on 2D Materials,” China Semiconductor Technology International Conference 2013, Shanghai, China, March 16 - 18, 2013
8. Han-Bo-Ram Lee, “Nucleation of 1D Pt Nanowires by Atomic Layer Deposition on Highly Ordered Pyrolytic Graphite,” 2013 Spring Conference of the Korean Institute of Metals & Materials, Jeju, Korea, April 25 - 26, 2013
7. Han-Bo-Ram Lee, “Nucleation & Growth of ALD Metal on Carbon Surfaces,” Korean Atomic Layer Deposition Workshop 2013, Seoul, Korea, April 26, 2013
6. Han-Bo-Ram Lee, “Nucleation Control in Atomic Layer Deposition by using Self-Assembled Monolayer,” Korean Materials Research Society Spring Meeting 2013, Yeosu, Korea, May 23-24, 2013
5. Han-Bo-Ram Lee, “Pt Nanoparticle Fabrication by Atomic Layer Deposition with Self-Assembled Monolayers,” The Korean Ceramic Society Fall Meeting 2013, Jeju, Korea, October 16 - 18, 2013
4. Hyungjun Kim, Han-Bo-Ram Lee, Woo-Hee Kim, Jaehong Yun, Doyoung Kim, “Atomic Layer Deposition for Nanoscale Contact Applications,” International Conference on Electronic Materials and Nanotechnology for Green Environment, Jeju, Korea, November 21 - 24, 2010
3. Han-Bo-Ram Lee and Hyungjun Kim, “The Applications of Atomic Layer Deposition of Cobalt for Nanoscale Devices,” International Conference on Nano Science and Nano Technology 2009, Mokpo, Korea, November 5 - 6, 2009
2. Hyungjun Kim, Han-Bo-Ram Lee, Yong Jun Park, Dong Ryeol Lee, Moon-Kyun Song, Woo-Hee Kim, Shi-Woo Rhee, and Sunggi Baik, “Synchrotron X-ray Scattering Study on the Initial Growth of Atomic Layer Deposition Thin Films for the Next Generation MOSFET,” Electroceramics XI, Manchester, UK, August 31 - September 3, 2008
1. Han-Bo-Ram Lee and Hyungjun Kim, “Atomic Layer Deposition for Nanoscale Contact Applications”, 25th International VLSI/ULSI Multilevel Interconnection Conference, Fremont, CA, USA, October 28 - 30, 2008
2016
60. Il-Kwon Oh, Hyungjun Kim*, and Han-Bo-Ram Lee*, “Surface-Energy-Controlled Nanoscale Coating of ALD REO for R2R Printed Electronics System,” Materials Research Society 2016 Fall Meeting, Boston, USA, November 27 - December 2, 2016
59. Il-Kwon Oh, Kang-Sik Kim, Zonghoon Lee, Kyung-Yong Ko, Su Jeong Lee, Jae-Min Myung, Clement LansalotMatras, Wontae Noh, Hyungjun Kim*, and Han-Bo-Ram Lee*, “Nanoscale Hydrophobic Coating by Atomic Layer Deposition Rare Earth Oxides,” Material Research Society 2015 Spring Meeting, San Francisco, CA, April 6 - 10, 2015
58. Jaehong Yoon, Soo-Hyun Kim, Hyungjun Kim, and Han-Bo-Ram Lee*, “Low Temperature Atomic Layer Deposition Pt for Electronic Textile Applications,” European Material Research Society 2015 Spring Meeting, Lille, France, May 11 - 15, 2015
57. Bo-Eun Park, Il-Kwon Oh, Clement Lansalot-Matras, David Thompson, Han-Bo-Ram Lee, and Hyungjun Kim*, “Significant Enhancement of the Electrical Properties through the Control of Oxygen Vacancy by Doping of Y into ZrO2,” 15th International Conference on Atomic Layer Deposition, Portland, USA, June 28 - July 1, 2015
56. Chang Mo Yoon, Il-Kwon Oh, Kangsik Kim, Zonghoon Lee, Clement Lansalot-Matras, Wontae Noh, Hyungjun Kim*, and Han-Bo-Ram Lee*, “Wettability of ALD Rare Earth Oxides for Superhydrophobic Coating,” 15th International Conference on Atomic Layer Deposition, Portland, USA, June 28 - July 1, 2015
55. Taewook Nam, Soohyeon Kim, Chang Wan Lee, Daewon Hong, Oh Joong Kwon, Han-Bo-Ram Lee* and Hyungjun Kim*, “Atomic Layer Deposition of Cobalt-based Bifunctional Layer for Cu Interconnect,” 2015 Advanced Metallization Conference (ADMETA Plus) 25th Asian Session, Seoul, Korea, September 16 - 18, 2015
54. Il-Kwon Oh, Chang Mo Yoon, Tae Hyung Kim, Geun Young Yeom, Kangsik Kim, Zonghoon Lee, Hanearl Jung, Changwan Lee, Han-Bo-Ram Lee*, and Hyungjun Kim*, “Lowering Plasma Damage in PE-ALD by using VHF Plasma Source,” 2015 Advanced Metallization Conference (ADMETA Plus) 25th Asian Session, Seoul, Korea, September 16 - 18, 2015
53. Il-Kwon Oh, Chang Mo Yoon, Kangsik Kim, Zonghoon Lee, Clement Lansalot-Matlas, Wontae Noh, Han-Bo-Ram Lee*, and Hyungjun Kim*, “Fundamental Study of Atomic Layer Deposited Rare Earth Oxides for Hydrophobic Coating,” International Workshop Atomic Layer Deposition Russia 2015, Moscow, Russia, September 21 - 23, 2015
52. Chang Mo Yoon, Il-Kwon Oh, Clement Lansalot-Matras, Wontae Noh, Hyungjun Kim*, and Han-Bo-Ram Lee*, “High Quality GeO2 by Atomic Layer Deposition,” International Workshop Atomic Layer Deposition Russia 2015, Moscow, Russia, September 21 - 23, 2015
51. Il-kwon Oh, Kangsik Kim, Clement Lansalot-Matras, Wontae Noh, Jukka Tanskanen, Han-Bo-Ram Lee*, and Hyungjun Kim*, “Nucleation and growth mechanism of atomic layer deposition HfO2 on graphene,” Material Research Society 2014 Spring Meeting, San Francisco, CA, April 21 - 25, 2014
50. Kwanpyo Kim, Han-Bo-Ram Lee, Richard W. Johnson, Jukka T. Tanskanen, Nan Liu, Myung-Gil Kim, Stacey F. Bent, and Zhenan Bao, “Atomic Layer Deposition of Pt at One-Dimensional Defects in Graphene,” Material Research Society 2014 Spring Meeting, San Francisco, CA, April 21 - 25, 2014
49. Jaehong Yoon, Soohyeon Kim, Hyungjun Kim, and Han-Bo-Ram Lee*, “Atomic Layer Deposition of Ni using NH3 Reactant on Carbon Surfaces,” 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15 - 18, 2014
48. Il-Kwon Oh, Kangsik Kim, Mi Jin Lee, Seungwoo Son, Zonghoon Lee, Clement Lansalot-Matras, Wontae Noh, Jukka Tanskanen, Han-Bo-Ram Lee*, and Hyungjun Kim, “Comparative study on nucleation and growth of atomic layer deposition HfO2 on graphene,” 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15 - 18, 2014
47. Bo-Eun Park, Il-Kwon Oh, Changwan Lee, Gyeongho Lee, Clement Lansalot-Matras, Wontae Noh, Hyungjun Kim*, and Han-Bo-Ram Lee*, “The Effects of Precursor Ligands on Growth Characteristics and Dielectric Properties of Atomic Layer Deposition HfO2,” International Conference on Microelectronics and Plasma Technology 2014, Gunsan, Korean, July 8 - 11, 2014
46. Jaehong Yoon, Soohyeon Kim, Hyungjun Kim*, and Han-Bo-Ram Lee*, “Atomic Layer Deposition of Ni using NH3 on Carbon Surfaces,” The 14th International Meeting on Information Display, Daegu, Korea, August 26 - 29, 2014
45. Jaehong Yoon, Soohyeon Kim, Hyungjun Kim, and Han-Bo-Ram Lee*, “Low Temperature and High Growth Rate Atomic Layer Deposition of Pt using a New Pt Precursor and O2 Reactant,” 2nd China Atomic Layer Deposition Conference, Shanghai, China, October 16 - 17, 2014
44. Jaehong Yoon, Soohyeon Kim, Hyungjun Kim, and Han-Bo-Ram Lee*, “Low Temperature and High Growth Rate Atomic Layer Deposition of Pt using a New Pt Precursor and O2 Reactant,” 2nd China Atomic Layer Deposition Conference, Shanghai, China, October 16 - 17, 2014
43. Gilsang Yoo, Il-Kwon Oh, Changwan Lee, Tae Hyung Kim, Geun Young Yeom, Hyungjun Kim*, and Han-Bo-Ram Lee*, “Effects of Very High Frequency O2 Plasma Reactant on High-k Film Properties Deposited by Atomic Layer Deposition,” PacSurf 2014 (Pacific Rim Symposium on Surfaces, Coating & Interfaces), Honolulu, HI, December 7 - 11, 2014
42. Artit Wangperawong, Steve M. Herron, Rory Runser, Han-Bo-Ram Lee, Stacey F. Bent, “SnS Solar Cell Development Using Vapor Transport Deposition,” Material Research Society 2013 Spring Meeting, San Francisco, CA, April 1 - 5, 2013
41. Han-Bo-Ram Lee and Stacey F. Bent, “Atomic Layer Deposition of Pt Using Ozone Reactant on Carbon Surfaces,” 13th International Conference on Atomic Layer Deposition, San Diego, CA, July 28 - 31, 2013
40. Jaehong Yoon, Han-Bo-Ram Lee, Byung-chul Cho, and Hyungjun Kim, “Area Selective Chemical Vapor Deposition of Co as a Capping Layer for Cu Interconnect,” Advanced Metallization Conference 2013: 23rd Asian Session, October 8 - 10, 2013
39. Ki-Yoon Kim, Jae-Ho Ham, Bae-Yeon Kim, Jeong-Gon Kim, Han-Bo-Ram Lee, Min-Seok Jeon, Min-Chul Shin, Hyung-Gyoo Shin, Sung-Youp Kim, Kwang-Youp Kim, Ji-Won Choi, “Effect of Alloy Compositions on Crystal structure of Oxide Layer by Plasma Electrolytic Oxidation,” The 5th Asia-Oceania Ceramic Federation (AOCF) Conference, Jeju, Korea, October 16 - 19, 2013
38. Jonathan Servaites, Jonathan R. Bakke, Han-Bo-Ram Lee, and Stacey F. Bent, “Reducing Interfacial Recombination in CIGS Buffer Layers via Nanoscale Compositional Grading,” Material Research Society 2012 Spring Meeting, San Francisco, CA, 2012.4
37. Han-Bo-Ram Lee and Stacey F. Bent, “Nucleation and formation of 1-D Pt nanowires by atomic layer deposition on highly oriented pyrolitic graphite,” Material Research Society 2012 Spring Meeting, San Francisco, CA, April 9 - 13, 2012
36. Bruce M. Clemens, Chia-Jung Chung, Stacey F. Bent, Han-Bo-Ram Lee, and Marja N. Mullings, “Nucleation Control in Atomic Layer Deposition and Hydrogen Storage Reactions,” The 23rd Conference on Crystal Growth and Epitaxy - West, Fallen Leaf Lake, CA, June 3 - 6, 2012
35. Han-Bo-Ram Lee and Stacey F. Bent, “Nucleation of 1-D Pt Nanowires by Atomic Layer Deposition on Highly Oriented Pyrolitic Graphite,” 12th International Conference on Atomic Layer Deposition, Dresden, Germany, June 17 - 20, 2012
34. Han-Bo-Ram Lee and Stacey F. Bent, “The Effects of TiO2 Crystallinity on Nucleation in Atomic Layer Deposition of Platinum,” 11th International Conference on Atomic Layer Deposition, Cambridge, MA, June 26 - 29, 2011
33. Han-Bo-Ram Lee, Woo-Hee Kim, Jeong Won Lee, Kwang Heo, In Chan Hwang, Sang-Joon Park, Seunghun Hong, and Hyungjun Kim, “Study on Co Atomic Layer Deposition with Various Reactants and Application to Area Selective Deposition,” International Semiconductor Technology Conference 2009, Shanghai, China, March 19 - 20, 2009
32. Yong Jun Park, Han-Bo-Ram Lee, Woo Hee Kim, Dong-Ryeol Lee, Hyungjun Kim, Shi-Woo Rhee, and Sunggi Baik, “In situ Synchrotron X-ray Scattering Study on The Initial Structure of Ru Metal Atomic Layer Deposition Films for The Electronic Devices,” Material Research Society 2009 Spring Meeting, San Francisco, CA, 2009.4
31. Han-Bo-Ram Lee, Woo-Hee Kim, Yongjun Park, Sunggi Baik, and Hyungjun Kim, “Cobalt and Nickel Atomic Layer Depositions for Contact Applications,” The 2009 IEEE International Interconnect Technology Conference, Sapporo, Japan, June 1 - 3, 2009
30. Hyungjun Kim, Han-Bo-Ram Lee, Woo-Hee Kim, Sang-Joon Park, and In Chan Hwang, “Nanomaterials Fabrication using Advanced Thin Film Deposition and Nanohybrid Process,” IEEE Nanotechnology Materials and Devices Conference 2009, Traverse City, MI, 2009.6
29. Han-Bo-Ram Lee, Woo-Hee Kim, and Hyungjun Kim, “Area Selective Atomic Layer Deposition of Transition Metals,” 9th International Conference on Atomic Layer Deposition, Monterey, CA, July 19 - 22, 2009
28. Hyungjun Kim, Woo-Hee Kim, Han-Bo-Ram Lee, and S. J. Lim, “The Benefits of Atomic Layer Deposition in NonSemiconductor Applications; Producing Metallic Nanomaterials and Fabrication of Flexible Display,” Electrochemical Society 216th Meeting, Vienna, Austria, October 4 - 9, 2009
27. Han-Bo-Ram Lee and Hyungjun Kim, “Formation of Silicide Nanowires by Atomic layer Deposition of Cobalt,” Electrochemical Society 216th Meeting, Vienna, Austria, October 4 - 9, 2009
26. Jae-Min Kim, Han-Bo-Ram Lee, Clement Lansalot, Christian Dussarrat, Julien Gatineau, and Hyungjun Kim, “Low Temperature Plasma-Enhanced Atomic Layer Deposition Co,” Advanced Metallization Conference 2009, Tokyo, Japan, 2009.10
25. Woo-Hee Kim, Han-Bo-Ram Lee, Kwang Heo, Seunghun Hong, and Hyungjun Kim, “Atomic Layer Deposition of Nickel Thin Films and Application to Area Selective Deposition,” Advanced Metallization Conference 2009, Tokyo, Japan, October 19 - 21, 2009
24. Han-Bo-Ram Lee, Sung Hwan Bang, Gil Ho Gu, Young Kuk Lee, Taek-Mo Chung, Chang Gyoun Kim, C. G. Park, and Hyungjun Kim, “Plasma-Enhanced Atomic Layer Deposition of Ni,” Advanced Metallization Conference 2009, Tokyo, Japan, October 19 - 21, 2009
23. Han-Bo-Ram Lee, Gil Ho Gu, C,G. Park, and Hyungjun Kim, “Cobalt Atomic Layer Deposition for Contact Applications of Nanoscale Devices,” International Semiconductor Technology Conference 2008, Shanghai, China, 2008.3
22. Han-Bo-Ram Lee, Gil Ho Gu, J.Y. Son, C.G. Park, and Hyungjun Kim, “High Quality Epitaxial CoSi2 using Plasma Nitridation-mediated Epitaxy; The Effects of Capping Layer,” Material Research Society 2008 Spring Meeting, San Francisco, CA, 2008.3
21. Sung- Hwan Bang, Han-Bo-Ram Lee, Young Kuk Lee, Taek-Mo Chung, Chang Gyoung Kim, and Hyungjun Kim, “Nickel and Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition,” Material Research Society 2008 Spring Meeting, San Francisco, CA, 2008.3
20. Sung-Hwan Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Cobalt and Nickel Thin Films by Plasma-Enhanced Atomic Layer Deposition,” 8th International Conference on Atomic Layer Deposition, Bruges, Belgium, 2008.7
19. Han-Bo-Ram Lee, Gil Ho Gu, J.Y. Son, C.G. Park, and Hyungjun Kim, “Spontaneous Formation of Metal Nanorods by PE-ALD,” 8th International Conference on Atomic Layer Deposition, Bruges, Belgium, 2008.7
18. Han-Bo-Ram Lee and Hyungjun Kim, “Cobalt Atomic Layer Deposition for Nanoscale Contact Applications,” 1st International Conference on Microelectronics and Plasma Technology, Jeju, Korea, 2008.8
17. Woo-Hee Kim, Sang-Joon Park, Han-Bo-Ram Lee, W. J. Maeng, and Hyungjun Kim, “Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films on Ta2O5 Substrate,” The 14th International Symposium on the Physics of Semiconductors and Applications, Jeju, Korea; 2008. 8
16. G. H. Gu, Han-Bo-Ram Lee, Hyungjun Kim, and C. G. Park, “Quantitative Atomic-Scale Analysis of Interface Structure of CoSi2 on polycrystalline and single crystalline silicon using by STEM-HAADF and 3D-AP,” The International Union of Crystallography, Nagoya, Japan, 2008.9
15. Woo-Hee Kim, Sang-Joon Park, Han-Bo-Ram Lee, and Hyungjun Kim, “Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films on Ta2O5 Substrate,” Advanced Metallization Conference 2008, Tokyo, Japan, 2008.10
14. Han-Bo-Ram Lee, Woo-Hee Kim, J. W. Lee, K. Heo, I. C. Whang, Sang-Joon Park , S. Hong, and Hyungjun Kim, “Area Selective Atomic Layer Deposition Co,” PRiME 2008 Electrochemical Society 214th Meeting, Honolulu, HI, 2008.10
13. G. H. Gu, Han-Bo-Ram Lee, Hyungjun Kim, and C. G. Park, “Atomic Structure and Composition at the Interface of Epitaxial CoSi2 on Si (001),” The 9th Asia-Pacific Microscopy Conference, Jeju, Korea, 2008.11
12. Han-Bo-Ram Lee, and Hyungjun Kim, “Epitaxial CoSi2 Growth from PE-ALD Co Films through Nitride-Mediated Epitaxy,” Material Research Society 2007 Spring Meeting, San Francisco, CA, 2007.4
11. Gil Ho Gu, Han-Bo-Ram Lee, Hyungjun Kim, and Chan Gyung Park, “STEM-HAADF Analysis of High Quality Epitaxial CoSi2 Grown on Si(001) by using Plasma Nitridation-Mediated Epitaxy,” The 11th Frontiers of Electron Microscopy in Materials Science Conference 2007, Sonoma, CA, 2007.9
10. Sung-Hwan Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Atomic Layer Deposition of Metal Films for Contact Applications of Nanoscale Devices,” Advanced Metallization Conference 2007, Tokyo, Japan, 2007.10
9. Han-Bo-Ram Lee, Woo Hee Kim, Yong Jun Park, Sunggi Baik, and Hyungjun Kim, “Analytical Study on Initial Growth Stage of Metal Atomic Layer Deposition by Synchrotron Radiation X-Ray Reflectivity Analysis,” Material Research Society 2007 Fall Meeting, Boston, MA, 2007.11
8. Han-Bo-Ram Lee and Hyungjun Kim, “Low Resistivity Cobalt Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition,” 6th International Conference on Atomic Layer Deposition 2006, Seoul, Korea, 2006.7
7. Sang-Joon Park, Han-Bo-Ram Lee, W. J. Maeng, and Hyungjun Kim, “Ru ALD: Comparative Studies between RuCp2 and Ru(EtCp)2,” 6th International Conference on Atomic Layer Deposition 2006, Seoul, Korea, 2006.7
6. Sang-Joon Park, Woo-Hee Kim, Han-Bo-Ram Lee, W. J. Maeng, and Hyungjun Kim, “Ru Thin Films Growth by Atomic Layer Deposition and Electrical Properties,” The 8th Cross Straits Symposium on Materials, Energy and Environmental Engineering, Pusan, Korea, 2006.11
5. Han-Bo-Ram Lee and Hyungjun Kim, “Co and CoSi2 Films Prepared by Plasma-Enhanced Atomic Layer Deposition for Contact Applications,” American Vacuum Society 53rd International Conference, San Francisco, CA, 2006.11
4. Sang-Joon Park, Woo-Hee Kim, Han-Bo-Ram Lee, W. J. Maeng, and Hyungjun Kim, “Ru Thin Films Growth by Atomic Layer Deposition and Electrical Properties,” The 8th Cross Straits Symposium on Materials, Energy and Environmental Engineering, Pusan, Korea, 2006.11
3. S. J. Kim, W. J. Maeng, Han-Bo-Ram Lee, D. H. Park, Byeong-Hyeok Sohn, and Hyungjun Kim, “High Density Magnetic Co Nanodot Array Fabrication using Self-Assembled Diblock Copolymer,” Material Research Society 2006 Fall Meeting, Boston, MA, 2006.11
2. W.J. Maeng, S.J. Lim, Han-Bo-Ram Lee, J.S. Park, and Hyungjun Kim, “The ALD of Various Oxides from Alkylamide Precursors: the Growth and Film Properties,” 5th International Conference on Atomic Layer Deposition, San Jose, CA, 2005.8
1. Han-Bo-Ram Lee, Sang-Joon Park, W.J. Maeng, Y.S. Yang, C.G. Park and Hyungjun Kim, “Ru ALD and Applications for Advanced Devices,” American Vacuum Society 52nd International Conference, Boston, MA, 2005.11
Contributed talks at Korean conferences
2015
16. Soohyeon Kim, Jaehong Yoon, Hyungjun Kim, and Han-Bo-Ram Lee, “Cobalt-based Bi-functional Layer for Cu Interconnect by Atomic Layer Deposition,” The 22nd Korean Conference on Semiconductors, Incheon, Korea, February 10 - 12, 2015
Bo-Eun Park, Il-Kwon Oh, David Thompson, Han-Bo-Ram Lee, and Hyungjun Kim*, 15. “Control of Oxygen Vacancy and Enhancement of the Electrical Properties by Doping of Y into ZrO2,” 2014 Korean Materials Research Society Spring Meeting, Gumi, Korea, May 14 - 15, 2015
2014
13. Soohyeon Kim, Jaehong Yoon, Han-Bo-Ram Lee, and Hyungjun Kim, “Silicidation of Ni prepared by Atomic Layer Deposition with NH3 Gas Reactant,” The 21st Korean Conference on Semiconductors, Seoul, Korea, February 24 - 26, 2014
12. Jaehong Yoon, Soohyeon Kim, Han-Bo-Ram Lee, Byeongchul Cho, and Hyungjun Kim, “Area-Selective Chemical Vapor Deposition of Co for Reduction of Cu Electromigration,” The 21st Korean Conference on Semiconductors, Seoul, Korea, February 24 - 26, 2014
11. Il-Kwon Oh, Han-earl Jung, Seung-Ki Lee, Jong-Hyun Ahn, Changwan Lee, Kangsik Kim, Mi Jin Lee, Zonghoon Lee, Clement Lansalot-Matras, Jukka Tanskanen, Hyungjun Kim, and Han-Bo-Ram Lee, “Nucleation and growth of Atomic Layer Deposition HfO2 on Graphene,” 2014 Korean Materials Research Society Fall Meeting, Daejeon, Korea, November 27 - 28, 2014 Go to the 1st page
10. Han-Bo-Ram Lee, Gil Ho Gu, C.G. Park, and Hyungjun Kim, “Ru/Co/Si Nanowire Core-Shell Structure by Atomic Layer Deposition for Si Nanowire Contact,” The 17th Korean Conference on Semiconductors, Daegu, Korea, 2010.2
9. Han-Bo-Ram Lee, Woo-Hee Kim, Jeong Won Lee, Kwang Heo, In Chan Hwang, Sang-Joon Park, Seunghun Hong, and Hyungjun Kim, “Area Selective Atomic Layer Deposition of Cobalt,” The 16th Korean Conference on Semiconductors, Daejun, Korea, 2009.2
8. Inchan Hwang, Sung-Hwan Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Surface Modification for Block Copolymer Nanolithography on Gold Surface,” Korean Ceramic Society Fall Meeting 2009, Pohang, Korea, 2009.4
7.Jae-Min Kim, Han-Bo-Ram Lee, Clement Lansalot, Christian Dussarrat, Julien Gatineau, and Hyungjun Kim, “Atomic Layer Deposition of Cobalt using a Novel Precursor,” The Materials Research Society of Korea 2009 Fall Meeting, Pohang, Korea, 2009.11
6. Han-Bo-Ram Lee, Gil Ho Gu, Jong Yeog Son, Chan Gyung Park, and Hyungjun Kim, “High Quality Epitaxial CoSi2 Using Plasma Nitridation-Mediated Epitaxy,” The 15th Korean Conference on Semiconductors, Pyengchang, Korea, 2008.2
5. Hyungjun Kim, Woo-Hee Kim, Han-Bo-Ram Lee, Sung-Hwan Bang, J.Y. Son, Gil Ho Gu, and C.G. Park, “Nanomaterials fabrication using atomic layer deposition,” The Korean Institute of Metals and Materials, Daejun, Korea, 2008.4
4. Han-Bo-Ram Lee, Woo-Hee Kim, Moon-Kyun Song, Yong Jun Park, Shi-Woo Rhee, Dong Ryeol Lee, Sunggi Baik, and Hyungjun Kim, “Synchrotron X-ray Reflectivity Study on the Initial Growth of Atomic Layer Deposition Thin Films,” 20th Korean Synchrotron Radiation User’s Association, Pohang, Korea, 2008.1
3. Han-Bo-Ram Lee and Hyungjun Kim, “Co and CoSi2 by PE-ALD for Contact Applications,” The 14th Korean Conference on Semiconductor, Jeju, Korea, 2007.2
2. S.H. Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Plasma Enhanced Atomic Layer Deposition of Ni”, The Materials Research Society of Korea 2007 Fall Meeting, Suwon, Korea, 2007.11
1. Han-Bo-Ram Lee, Sang-Joon Park, W. J. Maeng, Y. S. Yang, C. G. Park, and Hyungjun Kim, “Ru ALD on ALD Ta2O5 Substrates for Device Fabrication,” The 13th Korean Conference on Semiconductors, Jeju, Korea, 2006.2
13. Soohyeon Kim, Jaehong Yoon, Han-Bo-Ram Lee, and Hyungjun Kim, “Silicidation of Ni prepared by Atomic Layer Deposition with NH3 Gas Reactant,” The 21st Korean Conference on Semiconductors, Seoul, Korea, February 24 - 26, 2014
12. Jaehong Yoon, Soohyeon Kim, Han-Bo-Ram Lee, Byeongchul Cho, and Hyungjun Kim, “Area-Selective Chemical Vapor Deposition of Co for Reduction of Cu Electromigration,” The 21st Korean Conference on Semiconductors, Seoul, Korea, February 24 - 26, 2014
11. Il-Kwon Oh, Han-earl Jung, Seung-Ki Lee, Jong-Hyun Ahn, Changwan Lee, Kangsik Kim, Mi Jin Lee, Zonghoon Lee, Clement Lansalot-Matras, Jukka Tanskanen, Hyungjun Kim, and Han-Bo-Ram Lee, “Nucleation and growth of Atomic Layer Deposition HfO2 on Graphene,” 2014 Korean Materials Research Society Fall Meeting, Daejeon, Korea, November 27 - 28, 2014 Go to the 1st page
10. Han-Bo-Ram Lee, Gil Ho Gu, C.G. Park, and Hyungjun Kim, “Ru/Co/Si Nanowire Core-Shell Structure by Atomic Layer Deposition for Si Nanowire Contact,” The 17th Korean Conference on Semiconductors, Daegu, Korea, 2010.2
9. Han-Bo-Ram Lee, Woo-Hee Kim, Jeong Won Lee, Kwang Heo, In Chan Hwang, Sang-Joon Park, Seunghun Hong, and Hyungjun Kim, “Area Selective Atomic Layer Deposition of Cobalt,” The 16th Korean Conference on Semiconductors, Daejun, Korea, 2009.2
8. Inchan Hwang, Sung-Hwan Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Surface Modification for Block Copolymer Nanolithography on Gold Surface,” Korean Ceramic Society Fall Meeting 2009, Pohang, Korea, 2009.4
7.Jae-Min Kim, Han-Bo-Ram Lee, Clement Lansalot, Christian Dussarrat, Julien Gatineau, and Hyungjun Kim, “Atomic Layer Deposition of Cobalt using a Novel Precursor,” The Materials Research Society of Korea 2009 Fall Meeting, Pohang, Korea, 2009.11
6. Han-Bo-Ram Lee, Gil Ho Gu, Jong Yeog Son, Chan Gyung Park, and Hyungjun Kim, “High Quality Epitaxial CoSi2 Using Plasma Nitridation-Mediated Epitaxy,” The 15th Korean Conference on Semiconductors, Pyengchang, Korea, 2008.2
5. Hyungjun Kim, Woo-Hee Kim, Han-Bo-Ram Lee, Sung-Hwan Bang, J.Y. Son, Gil Ho Gu, and C.G. Park, “Nanomaterials fabrication using atomic layer deposition,” The Korean Institute of Metals and Materials, Daejun, Korea, 2008.4
4. Han-Bo-Ram Lee, Woo-Hee Kim, Moon-Kyun Song, Yong Jun Park, Shi-Woo Rhee, Dong Ryeol Lee, Sunggi Baik, and Hyungjun Kim, “Synchrotron X-ray Reflectivity Study on the Initial Growth of Atomic Layer Deposition Thin Films,” 20th Korean Synchrotron Radiation User’s Association, Pohang, Korea, 2008.1
3. Han-Bo-Ram Lee and Hyungjun Kim, “Co and CoSi2 by PE-ALD for Contact Applications,” The 14th Korean Conference on Semiconductor, Jeju, Korea, 2007.2
2. S.H. Bang, Han-Bo-Ram Lee, and Hyungjun Kim, “Plasma Enhanced Atomic Layer Deposition of Ni”, The Materials Research Society of Korea 2007 Fall Meeting, Suwon, Korea, 2007.11
1. Han-Bo-Ram Lee, Sang-Joon Park, W. J. Maeng, Y. S. Yang, C. G. Park, and Hyungjun Kim, “Ru ALD on ALD Ta2O5 Substrates for Device Fabrication,” The 13th Korean Conference on Semiconductors, Jeju, Korea, 2006.2
